Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA

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Bibliographic Information

Title
"Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA"
Statement of Responsibility
Mary-Ann Maher ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2007
Book size
28 cm

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Notes

Includes bibliographical references and author index

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