MEMS/NEMS : handbook techniques and applications

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Bibliographic Information

Title
"MEMS/NEMS : handbook techniques and applications"
Statement of Responsibility
edited by Cornelius T. Leondes
Publisher
  • Springer
Publication Year
  • c2006
Book size
25 cm
Series Name / No
  • : [set]
Other Title
  • MEMS/NEMS handbook : techniques and appplications

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Notes

Includes bibliographical references and index

Details 詳細情報について

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