Control of hydrocarbon radicals and film deposition by using an RF whistler wave discharge

CiNii Available at 1 libraries

Bibliographic Information

Title
"Control of hydrocarbon radicals and film deposition by using an RF whistler wave discharge"
Statement of Responsibility
Tetsu Mieno, Tatsuo Shoji, Kiyoshi Kadota
Publisher
  • Plasma Science Center, Nagoya University
Publication Year
  • 1991
Book size
30 cm

Search this Book/Journal

Notes

Cover title

"Received--September 25, 1991"--Cover

Includes bibliographical references (p. 11)

Related Books

See more

Details 詳細情報について

  • CRID
    1130000797253073792
  • NII Book ID
    BA21909223
  • Text Lang
    en
  • Country Code
    ja
  • Title Language Code
    en
  • Place of Publication
    • Nagoya
  • Data Source
    • CiNii Books
Back to top