Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

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Bibliographic Information

Title
"Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California"
Statement of Responsibility
chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division
Publisher
  • S.P.I.E.-- International Society for Optical Engineering
Publication Year
  • c1984
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographies and index

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