Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

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Bibliographic Information

Title
"Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993"
Statement of Responsibility
editors, H.G. Grimmeiss, M. Kittler and H. Richter
Publisher
  • SciTec Publications
Publication Year
  • 1993
Book size
25 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000797295268096
  • NII Book ID
    BA21152678
  • ISBN
    3908450004
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Untermuhleweg, Switzerland
  • Data Source
    • CiNii Books
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