Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Rafael Reif ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1997
Book size
24 cm

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Notes

Includes bibliographical references and index

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