Handbook of advanced plasma processing techniques

CiNii Available at 23 libraries

Bibliographic Information

Title
"Handbook of advanced plasma processing techniques"
Statement of Responsibility
R.J. Shul, S.J. Pearton (eds.)
Publisher
  • Springer
Publication Year
  • c2000
Book size
25 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000797501034496
  • NII Book ID
    BA48324956
  • ISBN
    3540667725
  • Text Lang
    en
  • Country Code
    gw
  • Title Language Code
    en
  • Place of Publication
    • Berlin
  • Data Source
    • CiNii Books
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