Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia

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Bibliographic Information

Title
"Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia"
Statement of Responsibility
Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Queensland University of Technology (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)
Publisher
  • SPIE
Publication Year
  • c2006
Book size
28 cm

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Notes

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics

Includes bibliographical references and index

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