Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California
Bibliographic Information
- Title
- "Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California"
- Statement of Responsibility
- Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1992
- Book size
- 28 cm
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Notes
"Part of a two-conference program on Microelectronic Manufacturing Science and Technology held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. vii
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000797571401216
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- NII Book ID
- BA26307002
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- ISBN
- 0819407259
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- LCCN
- 91067547
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- Web Site
- https://lccn.loc.gov/91067547
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Data Source
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- CiNii Books