ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

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Bibliographic Information

Title
"ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands"
Statement of Responsibility
edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division
Publisher
  • Electrochemical Society
Publication Year
  • c1995
Book size
23 cm
Other Title
  • Analytical techniques for semiconductor materials and process characterization II

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Notes

ALTECH 95 was held Sept. 28-29, 1995 in The Hague, Netherlands in conjunction with ESSDERC 95, the 25th European Solid State Device Research Conference, held Sept. 24-27, 1995

Includes bibliographical references and indexes

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