Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.

Web Site CiNii Available at 6 libraries

Bibliographic Information

Title
"Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A."
Statement of Responsibility
editors, George K. Celler, Juan R. Maldonado
Publisher
  • Materials Research Society
Publication Year
  • 1993
Book size
24 cm

Search this Book/Journal

Notes

Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993

Includes bibliographical references and indexes

Related Books

See more

Details 詳細情報について

Back to top