Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.
Bibliographic Information
- Title
- "Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A."
- Statement of Responsibility
- editors, George K. Celler, Juan R. Maldonado
- Publisher
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- Materials Research Society
- Publication Year
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- 1993
- Book size
- 24 cm
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Notes
Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000797590904960
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- NII Book ID
- BA21386704
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- ISBN
- 1558992022
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- LCCN
- 93034352
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- Web Site
- https://lccn.loc.gov/93034352
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pittsburgh, Pa.
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- Classification
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- LCC: TK7874
- DC20: 621.3815/31
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- Subject
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- Data Source
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- CiNii Books