Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California

Web Site CiNii Available at 4 libraries

Bibliographic Information

Title
"Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California"
Statement of Responsibility
Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • The Society
Publication Year
  • c1990
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

Back to top