Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
Statement of Responsibility
edited by J. Ruzyllo ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions
Publisher
  • The Electrochemical Society
Publication Year
  • c1994
Book size
23 cm

Search this Book/Journal

Notes

Includes bibliographies and index

"held during the Electrochemical Society Fall Meeting in New Orleans, Louisiana, October 15-20, 1993"

Related Books

See more

Details 詳細情報について

  • CRID
    1130000797837392512
  • NII Book ID
    BA23030456
  • ISBN
    1566770386
  • LCCN
    93072867
  • Web Site
    https://lccn.loc.gov/93072867
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
Back to top