Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Bibliographic Information
- Title
- "Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
- Statement of Responsibility
- edited by J. Ruzyllo ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions
- Publisher
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- The Electrochemical Society
- Publication Year
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- c1994
- Book size
- 23 cm
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Notes
Includes bibliographies and index
"held during the Electrochemical Society Fall Meeting in New Orleans, Louisiana, October 15-20, 1993"
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Details 詳細情報について
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- CRID
- 1130000797837392512
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- NII Book ID
- BA23030456
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- ISBN
- 1566770386
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- LCCN
- 93072867
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- Web Site
- https://lccn.loc.gov/93072867
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books