Ion implantation range and energy deposition distributions

Details 詳細情報について

• CRID

  1130000797976404992

• NII Book ID

  BA01201613

• ISBN

  0306674017

• LCCN

  74034119

• Web Site

  https://lccn.loc.gov/74034119

• Country Code

  us

• Title Language Code

  en

• Place of Publication

  • New York

• Classification

  • LCC: QC702.7.I55
  • DC: 541/.372

• Subject

  • LCSH: Ion implantation

• Data Source

  • CiNii Books