Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Bibliographic Information

Title
"Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films"
Statement of Responsibility
editors M. Jamal Deen ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society]
Publisher
  • Electrochemical Society
Publication Year
  • c1997
Book size
23 cm
Other Title
  • Silicon nitride and silicon dioxide thin insulating films

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Notes

Includes bibliographic references and indexes

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