Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg
Publisher
  • North-Holland
Publication Year
  • c1983
Book size
24 cm

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Notes

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso

Includes bibliographical references and indexes

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