In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title: "In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A."

Statement of Responsibility: editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg

Publisher

Publication Year

Includes bibliographical references and indexes

CRID

1130000798058981632
NII Book ID

BA10860020
ISBN

1558990461
LCCN

90034801
Web Site

https://lccn.loc.gov/90034801
Text Lang

en
Country Code

us
Title Language Code

en
Place of Publication
- Pittsburgh, Pa.
Classification
- LCC: TK7871.85
- DC20: 621.381/52
Subject
- LCSH: Semiconductors -- Etching -- Congresses
- LCSH: Semiconductor doping -- Congresses
- LCSH: Lasers -- Industrial applications -- Congresses
- LCSH: Plasma etching -- Congresses
Data Source
- CiNii Books