Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

Name: Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
Author: Society of Photo-optical Instrumentation Engineers, Bergmann, Neil W., Abbott, Derek, Hariz, Ahsan J., Varadan, V. K.

Society of Photo-optical Instrumentation Engineers, Bergmann, Neil W., Abbott, Derek, Hariz, Ahsan J., Varadan, V. K.

Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

CiNii 所蔵館 2館

書誌事項

タイトル: "Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia"

責任表示: Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

出版者

SPIE--the International Society of Optical Engineering

出版年月

c2001

書籍サイズ: 28 cm

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Includes index

Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

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Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

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