Physics of radio-frequency plasmas

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Bibliographic Information

Title
"Physics of radio-frequency plasmas"
Statement of Responsibility
Pascal Chabert, Nicholas Braithwaite
Publisher
  • Cambridge University Press
Publication Year
  • 2011
Book size
26 cm
Series Name / No
  • : hardback

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Notes

Includes bibliographical references (p. 375-382) and index

Details 詳細情報について

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