Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Bibliographic Information
- Title
- "Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films"
- Statement of Responsibility
- editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions
- Publisher
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- Electrochemical Society
- Publication Year
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- c1994
- Book size
- 23 cm
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Notes
Includes bibliographical references
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Details 詳細情報について
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- CRID
- 1130000798246154112
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- NII Book ID
- BA23818650
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- ISBN
- 1566770483
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- LCCN
- 94070848
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- Web Site
- https://lccn.loc.gov/94070848
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Classification
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- LCC: TK7872.T55
- DC20: 621.381/52
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- Data Source
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- CiNii Books