Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Bibliographic Information

Title
"Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films"
Statement of Responsibility
editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1994
Book size
23 cm

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Notes

Includes bibliographical references

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