Automated photomask inspection
Bibliographic Information
- Title
- "Automated photomask inspection"
- Statement of Responsibility
- Donald B. Novotny and Dino R. Ciarlo
- Publisher
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- U.S. G.P.O.
- Publication Year
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- 1978
- Book size
- 26 cm
- Volume(Year)
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- v.1
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Notes
Includes bibliographical references
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Details 詳細情報について
-
- CRID
- 1130000798333969536
-
- NII Book ID
- BB18842019
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- LCCN
- 78606023
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- Country Code
- us
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- Title Language Code
- en
-
- Place of Publication
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- Washington
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- Classification
-
- LCC: QC100
- LCC: TK7874
- DC: 602/.1 s
- DC: 621.381/73/028
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- Subject
-
- Data Source
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- CiNii Books