Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

Name: Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany
Author: Modeling Aspects in Optical Metrology, Bosse, Harald, Bodermann, Bernd, Silver, Richard M., SPIE Europe, European Optical Society, Wissenschaftliche Gesellschaft Lasertechnik e.V., Society of Photo-optical Instrumentation Engineers

Modeling Aspects in Optical Metrology, Bosse, Harald, Bodermann, Bernd, Silver, Richard M., SPIE Europe, European Optical Society, Wissenschaftliche Gesellschaft Lasertechnik e.V., Society of Photo-optical Instrumentation Engineers

Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

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Bibliographic Information

Title: "Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany"

Statement of Responsibility: Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

Publisher

SPIE

Publication Year

c2007

Book size: 28 cm

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Notes

Includes bibliographical references and author index

Related Books

Details 詳細情報について

CRID: 1130004954237660672

NII Book ID: BC02904759

ISBN: 9780819467591

LCCN: 2007281789

Web Site: https://lccn.loc.gov/2007281789

Text Lang: en

Country Code: us

Title Language Code: en

Place of Publication

Bellingham, Wash.

Classification

LCC: QC367
DC22: 681/.25

Subject

LCSH: Optical measurements -- Congresses
LCSH: Integrated circuits -- Congresses
LCSH: Semiconductors -- Design and construction -- Congresses

Data Source

CiNii Books

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