17th Annual Symposium on Photomask Technology and Management : [proceedings] : 17-19 September, 1997, Redwood City, California

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Bibliographic Information

Title
"17th Annual Symposium on Photomask Technology and Management : [proceedings] : 17-19 September, 1997, Redwood City, California"
Statement of Responsibility
James A Reynolds, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
Publisher
  • SPIE
Publication Year
  • c1998
Book size
28 cm
Other Title
  • 17th Annual BACUS Symposium on Photomask Technology and Management

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Notes

Includes bibliographical references and index

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