Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California
Bibliographic Information
- Title
- "Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California"
- Statement of Responsibility
- Jan J. Dubowski, Peter E. Dyer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1998
- Book size
- 28 cm
- Other Title
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- Laser applications in microelectronic and optoelectronic manufacturing 3
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130006495849168655
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- NII Book ID
- BC06948712
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- ISBN
- 0819427136
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- LCCN
- 98233181
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- Web Site
- https://lccn.loc.gov/98233181
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Data Source
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- CiNii Books