Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California
Bibliographic Information
- Title
- "Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California"
- Statement of Responsibility
- Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
- Publisher
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- SPIE
- Publication Year
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- c1998
- Book size
- 28 cm
- Other Title
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- Micromachined devices and components 4
- Micromachined devices and components four
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
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- CRID
- 1130006650862833937
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- NII Book ID
- BC07260267
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- ISBN
- 0819429732
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- LCCN
- 98226766
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- Web Site
- https://lccn.loc.gov/98226766
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Washington
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- Subject
-
- Data Source
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- CiNii Books