Optical micro- and nanometrology in manufacturing technology : 29-30 April, 2004, Strasbourg, France

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Bibliographic Information

Title
"Optical micro- and nanometrology in manufacturing technology : 29-30 April, 2004, Strasbourg, France"
Statement of Responsibility
Christophe Gorecki, Anand K. Asundi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2004
Book size
28 cm

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