MOEMS and miniaturized systems IV : 27-28 January, 2004, San Jose, California, USA

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Bibliographic Information

Title
"MOEMS and miniaturized systems IV : 27-28 January, 2004, San Jose, California, USA"
Statement of Responsibility
Ayman El-Fatatry, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2004
Book size
28 cm
Other Title
  • MOEMS and miniaturized systems 4
  • Microelectromechanical systems and miniaturized systems 4

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Notes

Includes bibliographical references and index

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