MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

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Bibliographic Information

Title
"MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA"
Statement of Responsibility
Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Publisher
  • SPIE
Publication Year
  • c2003
Book size
28 cm

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Notes

Includes bibliographical references and index

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