Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA
書誌事項
- タイトル
- "Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA"
- タイトル別名
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- Reliability, testing and characterization of MEMS/MOEMS
- Reliability, packaging, testing, and characterization of MEMS, MOEMS 4
- 責任表示
- Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and materials International, Solid State Technology [and] Sandia National Laboratories (USA)
- 出版者
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- SPIE
- 出版年月
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- c2005
- 書籍サイズ
- 28 cm
この図書・雑誌をさがす
注記
Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS
Includes bibliographical references and author index
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詳細情報 詳細情報について
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- CRID
- 1970867909893913733
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- NII書誌ID
- BC16161299
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- ISBN
- 081945690X
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- LCCN
- 2005299120
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- Web Site
- https://lccn.loc.gov/2005299120
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- 本文言語コード
- en
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- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Bellingham, Wash.
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- データソース種別
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- NACSIS-CAT/ILL
- CiNii Books