MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
Bibliographic Information
- Title
- "MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA"
- Statement of Responsibility
- Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)
- Publisher
-
- SPIE
- Publication Year
-
- c2008
- Book size
- 28 cm
- Other Title
-
- MEMS MOEMS components and their applications 5
Search this Book/Journal
Notes
Includes bibliographical references and author index
- Tweet
Details 詳細情報について
-
- CRID
- 1130011528893912101
-
- NII Book ID
- BC16159504
-
- ISBN
- 9780819470607
-
- LCCN
- 2010459242
-
- Web Site
- https://lccn.loc.gov/2010459242
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash.
-
- Data Source
-
- CiNii Books