MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA

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Bibliographic Information

Title
"MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA"
Statement of Responsibility
Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)
Publisher
  • SPIE
Publication Year
  • c2008
Book size
28 cm
Other Title
  • MEMS MOEMS components and their applications 5

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Notes

Includes bibliographical references and author index

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