64- to 256-megabit reticle generation : technology requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California

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Title: "64- to 256-megabit reticle generation : technology requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California"

Statement of Responsibility: Gregory K. Hearn, editor ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology

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Sixty-four to two hundred fifty-six-megabit reticle generation
Technology requirements and approaches
Proceedings of the Conference on the 64- to 256-megabit Reticle Generation, 24 September 1993, Santa Clara, California

Includes bibliographical references and index

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