Bibliographic Information
- Title
- "Plasma etching in semiconductor fabrication"
- Statement of Responsibility
- Russ A. Morgan
- Publisher
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- Elsevier
- Publication Year
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- c1985
- Book size
- 25 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282268654030592
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- NII Book ID
- BA00003964
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- ISBN
- 0444424199
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- LCCN
- 85004392
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- Web Site
- https://lccn.loc.gov/85004392
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- Text Lang
- en
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- Country Code
- ne
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- Title Language Code
- en
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- Place of Publication
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- Amsterdam ; Tokyo
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- Classification
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- LCC: TK7871.85
- DC19: 621.3815/2
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- Subject
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- LCSH: Semiconductors -- Etching
- LCSH: Plasma etching
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- Data Source
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- CiNii Books