3D process technology
CiNii
Available at 1 libraries
Bibliographic Information
- Title
- "3D process technology"
- Statement of Responsibility
- edited by Philip Garrou, Mitsumasa Koyanagi and Peter Ramm
- Publisher
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- Wiley-VCH
- Publication Year
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- c2014
- Book size
- 26 cm
- Series Name / No
-
- hbk.
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282268702252544
-
- NII Book ID
- BB18909379
-
- ISBN
- 9783527334667
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- Text Lang
- en
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- Country Code
- gw
-
- Title Language Code
- en
-
- Place of Publication
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- Weinheim, Germany
-
- Classification
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- DC23: 621.3815
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- Subject
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- LCSH: Integrated circuits
- LCSH: Integrated circuits -- Design and construction
- LCSH: Silicon
- LCSH: Three-dimensional imaging
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- Data Source
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- CiNii Books