Nanofabrication : principles to laboratory practice

Name: Nanofabrication : principles to laboratory practice
Author: Sarangan, Andrew

Web Site CiNii Available at 1 libraries

Bibliographic Information

Publisher

Publication Year

Series Name / No

Includes bibliographical references and index

CRID

1130282268795233792
NII Book ID

BB25204136
ISBN

9781498725576
LCCN

2016008970
Web Site

https://lccn.loc.gov/2016008970
Text Lang

en
Country Code

us
Title Language Code

en
Place of Publication
- Boca Raton
Classification
- LCC: TK7874.843
- DC23: 621.3815/31
Subject
- LCSH: Nanolithography
- LCSH: Nanostructured materials -- Design and construction
- LCSH: Semiconductors -- Etching
- LCSH: Nanoelectronics -- Experiments
Data Source
- CiNii Books