Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

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Bibliographic Information

Title
"Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A."
Statement of Responsibility
editors, Marc Wittmer, James Stimmell, Michael Strathman
Publisher
  • Materials Research Society
Publication Year
  • c1986
Book size
24 cm

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Notes

Includes bibliographies and indexes

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