An introduction to microelectromechanical systems engineering

Details 詳細情報について

• CRID

  1130282268956715648

• NII Book ID

  BA46828722

• ISBN

  0890065810

• LCCN

  99052406

• Web Site

  https://lccn.loc.gov/99052406

• Text Lang

  en

• Country Code

  us

• Title Language Code

  en

• Place of Publication

  • Boston

• Classification

  • DC21: 621.381

• Subject

  • LCSH: Microelectromechanical systems

• Data Source

  • CiNii Books