Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Bibliographic Information
- Title
- "Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing"
- Statement of Responsibility
- editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions
- Publisher
-
- Electrochemical Society
- Publication Year
-
- c1997
- Book size
- 23 cm
Search this Book/Journal
Notes
"Part of the 191st Meeting of the Electrochemical Society"--P. iii
Includes bibliographical references and indexes
- Tweet
Details 詳細情報について
-
- CRID
- 1130282269023356032
-
- NII Book ID
- BA4312797X
-
- ISBN
- 1566771366
-
- LCCN
- 97211633
-
- Web Site
- https://lccn.loc.gov/97211633
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Pennington, NJ
-
- Classification
-
- LCC: TK7871.85
- DC: 621.3815/2
-
- Data Source
-
- CiNii Books