Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 9. Nov. 1989

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Bibliographic Information

Title
"Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 9. Nov. 1989"
Statement of Responsibility
VDI/VDE-Gesellschaft Feinwerktechnik
Publisher
  • VDI Verlag
Publication Year
  • 1989
Book size
23 cm

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