Laser processing of semiconductor devices : January 18-19, 1983, Los Angeles, California
Bibliographic Information
- Title
- "Laser processing of semiconductor devices : January 18-19, 1983, Los Angeles, California"
- Statement of Responsibility
- chairman/editor: Charles C. Tang ; cooperating organization, Materials Research Society
- Publisher
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- S.P.I.E.-- the International Society for Optical Engineering
- Publication Year
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- c1983
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282269229126400
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- NII Book ID
- BA23950523
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- ISBN
- 0892524200
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- LCCN
- 83061336
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- Web Site
- https://lccn.loc.gov/83061336
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Subject
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- LCSH: Microelectronics
- LCSH: Lasers -- Industrial applications
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- Data Source
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- CiNii Books