Proceedings of the First International Symposium on Chemical Mechanical Planarization

CiNii Available at 1 libraries

Bibliographic Information

Title
"Proceedings of the First International Symposium on Chemical Mechanical Planarization"
Statement of Responsibility
editors, I. Ali, S. Raghavan
Publisher
  • Electrochemical Society
Publication Year
  • c1997
Book size
24 cm

Search this Book/Journal

Notes

"Electronics and Delectric Science and Technology Divisions"

Includes bibliographical references and indexes

Related Books

See more

Details 詳細情報について

  • CRID
    1130282269250480000
  • NII Book ID
    BA32334994
  • ISBN
    1566771722
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
Back to top