Proceedings of the First International Symposium on Chemical Mechanical Planarization
CiNii
Available at 1 libraries
Bibliographic Information
- Title
- "Proceedings of the First International Symposium on Chemical Mechanical Planarization"
- Statement of Responsibility
- editors, I. Ali, S. Raghavan
- Publisher
-
- Electrochemical Society
- Publication Year
-
- c1997
- Book size
- 24 cm
Search this Book/Journal
Notes
"Electronics and Delectric Science and Technology Divisions"
Includes bibliographical references and indexes
- Tweet
Details 詳細情報について
-
- CRID
- 1130282269250480000
-
- NII Book ID
- BA32334994
-
- ISBN
- 1566771722
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Pennington, NJ
-
- Data Source
-
- CiNii Books