Optical/laser microlithography : 3-5 March 1993, San Jose, California
Bibliographic Information
- Title
- "Optical/laser microlithography : 3-5 March 1993, San Jose, California"
- Statement of Responsibility
- John D. Cuthbert, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1993
- Book size
- 28 cm
- Series Name / No
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- pt. 1
- pt. 2
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282269303704576
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- NII Book ID
- BA27107326
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- ISBN
- 0819411612
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- LCCN
- 93084068
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- Web Site
- https://lccn.loc.gov/93084068
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- Text Lang
- en
-
- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Subject
-
- Data Source
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- CiNii Books