Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing

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書誌事項

タイトル
"Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing"
責任表示
edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller
出版者
  • Electrochemical Society
出版年月
  • c1989
書籍サイズ
23 cm
タイトル別名
  • Automated integrated circuits manufacturing
  • Proceedings of the 4th Symposium on Automated Integrated Circuits Manufacturing
  • Fourth International Symposium of Automated IC Manufacturing
  • AIM-IV

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注記

Includes bibliographical references and indexes

Co-sponsored by: Electronics and Dielectrics and Insulation Divisions

"... the Fourth International Symposium of Automated IC Manufacturing (AIM-IV) held October 9-14, 1988 in Chicago, Illinois" -- on pref

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