Plasma properties, deposition and etching
CiNii
Available at 5 libraries
Bibliographic Information
- Title
- "Plasma properties, deposition and etching"
- Statement of Responsibility
- editors, J.J. Pouch and S.A. Alterovitz
- Publisher
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- Trans Tech Publications
- Publication Year
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- c1993
- Book size
- 25 cm
- Other Title
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- Materials science forum
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Notes
Includes index
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Details 詳細情報について
-
- CRID
- 1130282269323267840
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- NII Book ID
- BA21753645
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- ISBN
- 087849670X
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Aedermannsdorf, Switzerland
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- Data Source
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- CiNii Books