Plasma properties, deposition and etching

CiNii Available at 5 libraries

Bibliographic Information

Title
"Plasma properties, deposition and etching"
Statement of Responsibility
editors, J.J. Pouch and S.A. Alterovitz
Publisher
  • Trans Tech Publications
Publication Year
  • c1993
Book size
25 cm
Other Title
  • Materials science forum

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Notes

Includes index

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Details 詳細情報について

  • CRID
    1130282269323267840
  • NII Book ID
    BA21753645
  • ISBN
    087849670X
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Aedermannsdorf, Switzerland
  • Data Source
    • CiNii Books
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