Processing of films for high Tc superconducting electronics : 10-12 October 1989, Santa Clara, California
Bibliographic Information
- Title
- "Processing of films for high Tc superconducting electronics : 10-12 October 1989, Santa Clara, California"
- Statement of Responsibility
- T. Venkatesan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH
- Publisher
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- SPIE
- Publication Year
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- c1990
- Book size
- 28 cm
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Notes
On t.p. "c" is subscript
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282269329661312
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- NII Book ID
- BA2446664X
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- ISBN
- 0819402230
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- LCCN
- 89043523
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- Web Site
- https://lccn.loc.gov/89043523
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7872.T55
- DC20: 621.381/52
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- Subject
-
- Data Source
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- CiNii Books