Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA

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Bibliographic Information

Title
"Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA"
Statement of Responsibility
Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2000
Book size
28 cm

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Notes

Includes bibliographic references and author index

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