Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
Bibliographic Information
- Title
- "Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium"
- Statement of Responsibility
- editors, K.B. Sundaram ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2001
- Book size
- 23 cm
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Notes
"The Dielectric Science and Technology, electronics and High temperature Materials Divisions of the Electrochemical Society co-sponsored the symposium ..."--on pref
"... held on March 25-30, 2001 in Washington, DC U.S.A."--on pref
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282269400490624
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- NII Book ID
- BA54513104
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- ISBN
- 156677313X
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- LCCN
- 01092446
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- Web Site
- https://lccn.loc.gov/01092446
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Classification
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- LCC: TK7872.T55
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- Data Source
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- CiNii Books
