Bibliographic Information
- Title
- "Polymers in microlithography : materials and processes"
- Statement of Responsibility
- Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
- Publisher
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- American Chemical Society
- Publication Year
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- 1989
- Book size
- 23 cm
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Notes
Includes bibliographical references and indexes
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989"
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Details 詳細情報について
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- CRID
- 1130282269437084160
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- NII Book ID
- BA07699969
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- ISBN
- 0841217017
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- LCCN
- 89017931
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- Web Site
- https://lccn.loc.gov/89017931
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Washington, D.C.
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- Classification
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- LCC: TK7871.15.P6
- DC20: 621.381/531
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- Subject
-
- Data Source
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- CiNii Books
