Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

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Bibliographic Information

Title
"Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium"
Statement of Responsibility
editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics
Publisher
  • Electrochemical Society
Publication Year
  • c2003
Book size
24 cm

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Notes

"... held April 28-May 2, 2003 in Paris as a part of the 203rd Meeting of the Electrochemical Society (ECS)"--on pref

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282269464592000
  • NII Book ID
    BA62538381
  • ISBN
    1566773474
  • LCCN
    2003100710
  • Web Site
    https://lccn.loc.gov/2003100710
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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