Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

Name: Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California
Author: Narayan, J. (Jaydish), Society of Photo-optical Instrumentation Engineers

Narayan, J. (Jaydish), Society of Photo-optical Instrumentation Engineers

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

Web Site CiNii Available at 3 libraries

Narayan, J. (Jaydish)
Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Title: "Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California"

Statement of Responsibility: J. Narayan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMATECH [and] Center for Advanced Electronic Materials Processing, North Carolina State University [and] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison

Publisher

SPIE

Publication Year

c1990

Book size: 28 cm

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Notes

Includes bibliographical references and index

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