CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A."
Statement of Responsibility
editors: Alexander A. Demkov ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2009
Book size
24 cm

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Notes

Other editors: Bill Taylor, H. Rusty Harris, Jeffery W. Butterbaugh, Willy Rachmady

Includes bibliographical references and indexes

"..., 'CMOS gate-stack scaling--materials, interfaces and reliability implications,' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.

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Details 詳細情報について

  • CRID
    1130282269636947456
  • NII Book ID
    BB02098415
  • ISBN
    9781605111285
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, Pa.
  • Data Source
    • CiNii Books
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